Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F15%3A33154106" target="_blank" >RIV/61989592:15310/15:33154106 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/15:00510824
Result on the web
<a href="http://link.springer.com/article/10.1007%2Fs10853-014-8715-0" target="_blank" >http://link.springer.com/article/10.1007%2Fs10853-014-8715-0</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s10853-014-8715-0" target="_blank" >10.1007/s10853-014-8715-0</a>

Result language
angličtina
Original language name
Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures
Original language description
The mechanical properties of amorphous silicon carbonitride (a-SiC (x) N (y) ) films with various nitrogen content (y = 0-40 at.%) were investigated in situ at elevated temperatures up to 650 A degrees C in inert atmosphere. A SiC film was measured alsoat 700 A degrees C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments totemperatures of 300, 500, and 650 A degrees C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content. Furthermore, the hardness of both the a-SiC and the a-SiCN films with lower nitrogen content at 300 A degrees C drops to approx. 77 % of the corresponding room temperature values, while it reduces to 69 % for the a-SiCN film
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JH - Ceramics, fire-proof materials and glass
OECD FORD branch
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Project
<a href="/en/project/LO1305" target="_blank" >LO1305: Development of the center of advanced technologies and materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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