Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00427277" target="_blank" >RIV/68378271:_____/14:00427277 - isvavai.cz</a>

Alternative codes found

RIV/61989592:15310/14:33153072

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.12.017" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.12.017</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.12.017" target="_blank" >10.1016/j.surfcoat.2013.12.017</a>

Result language

angličtina

Original language name

Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films

Original language description

Amorphous SiCxNy films (of 2.2?2.7 ?m) were deposited on Si(111) substrates by reactive DC magnetron sputtering. The SiC target with small excess of carbon was sputtered at various nitrogen/argon gas flow ratios (0?0.48).The as-deposited films were additionally annealed at temperatures of 700, 900 and 1100 °C in the air during 30 min and at 900 °C in vacuum during 1 h. The depth profile of hardness and elastic modulus (nanoindentation), change of the film thickness, film composition and structure (Ramanand Infrared spectroscopy) were investigated in dependence on annealing temperature and content of nitrogen. The hardness of the as-deposited films decreases with the growth of nitrogen/argon flow ratio.Air annealing at 1100 °C leads to intensive surface oxidation and formation of graphite-like structure in carbon clusters of inner layers.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

240

Issue of the periodical within the volume

FEB

Country of publishing house

CH - SWITZERLAND

Number of pages

10

Pages from-to

76-85

UT code for WoS article

000331989900011

EID of the result in the Scopus database

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