Mechanical properties and structure of amorphous and crystalline B4C films
Result description
Amorphous and crystalline films were prepared by magnetron sputtering of hot-pressed B4C target. Hardness, elastic modulus, intrinsic stress and structure were investigated in dependence on the substrate bias and deposition temperature. Electron diffraction and Raman spectroscopy show amorphous structure for all the films deposited at temperatures below 900 °C. Crystalline B4C phase appears at T > 900 °C. The hardness and elastic modulus of the films deposited on unheated substrates decrease with increasing negative substrate bias. These variations correlate well with those observed for compressive stress, argon content in films and intensity of Raman spectra.
Keywords
The result's identifiers
Result code in IS VaVaI
Alternative codes found
RIV/61989592:15310/09:00010954
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Mechanical properties and structure of amorphous and crystalline B4C films
Original language description
Amorphous and crystalline films were prepared by magnetron sputtering of hot-pressed B4C target. Hardness, elastic modulus, intrinsic stress and structure were investigated in dependence on the substrate bias and deposition temperature. Electron diffraction and Raman spectroscopy show amorphous structure for all the films deposited at temperatures below 900 °C. Crystalline B4C phase appears at T > 900 °C. The hardness and elastic modulus of the films deposited on unheated substrates decrease with increasing negative substrate bias. These variations correlate well with those observed for compressive stress, argon content in films and intensity of Raman spectra.
Czech name
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Czech description
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Classification
Type
Jimp - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
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Volume of the periodical
18
Issue of the periodical within the volume
1
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
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UT code for WoS article
000263229400005
EID of the result in the Scopus database
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Basic information
Result type
Jimp - Article in a specialist periodical, which is included in the Web of Science database
OECD FORD
Condensed matter physics (including formerly solid state physics, supercond.)
Year of implementation
2009