Mechanical properties and structure of amorphous and crystalline B4C films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F09%3A00322294" target="_blank" >RIV/68378271:_____/09:00322294 - isvavai.cz</a>

Alternative codes found

RIV/61989592:15310/09:00010954

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Mechanical properties and structure of amorphous and crystalline B4C films

Original language description

Amorphous and crystalline films were prepared by magnetron sputtering of hot-pressed B4C target. Hardness, elastic modulus, intrinsic stress and structure were investigated in dependence on the substrate bias and deposition temperature. Electron diffraction and Raman spectroscopy show amorphous structure for all the films deposited at temperatures below 900 °C. Crystalline B4C phase appears at T > 900 °C. The hardness and elastic modulus of the films deposited on unheated substrates decrease with increasing negative substrate bias. These variations correlate well with those observed for compressive stress, argon content in films and intensity of Raman spectra.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Volume of the periodical

18

Issue of the periodical within the volume

1

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

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UT code for WoS article

000263229400005

EID of the result in the Scopus database

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