Nanostructured WO3 based bilayer thin films for hydrogen gas sensing

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F20%3A43960056" target="_blank" >RIV/49777513:23520/20:43960056 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Nanostructured WO3 based bilayer thin films for hydrogen gas sensing
Original language description
In this study we demonstrate the advantages of two advanced sputtering techniques for preparation of thin film conductometric gas sensor. We combined tungsten trioxide (WO3) thin films prepared by conventional reactive dc sputtering with (i) cupric oxide (CuO) nanoclusters deposited by gas aggregation cluster source (GAS) and (ii) with nanostructured copper tungstate (CuWO4) layer prepared by reactive rf sputtering. Both approaches enabled us to synthetize nanostructures with an enhanced conductometric sensorial response in comparison with WO3 film alone. The enhanced response is explained by forming of nanosized electronic junctions. In case of CuO nanocluster, the p-n junction is formed, CuO is p-type semiconductor, WO3 is n-type. The copper tungstate is n-type and so hetero n-n junction is formed. Presented techniques creates nanostructured sensing material without need of any wet process-steps nor sintering. This makes them suitable choices for integrating of nanostructured hydrogen sensors with microcircuits.
Czech name
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Czech description
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Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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