Reactive high-power impulse magnetron sputtering of high-performance thermochromic VO2-based coatings for energy-saving smart windows

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43970251" target="_blank" >RIV/49777513:23520/23:43970251 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Reactive high-power impulse magnetron sputtering of high-performance thermochromic VO2-based coatings for energy-saving smart windows
Original language description
The paper deals with a scalable sputter deposition technique to prepare strongly thermochromic YSZ/W-doped VO2/YSZ coatings on standard soda-lime glass at a relatively low substrate surface temperature (350 °C) and without any substrate bias voltage. The W-doped VO2 layers were deposited using a controlled reactive deep oscillation magnetron sputtering of a V‒W target. In contrast, the antireflection Y-stabilized ZrO2 (YSZ) layers were deposited using a controlled reactive standard high-power impulse magnetron sputtering of a Zr‒Y target. The fundamental principles of this technique and the structure and optical properties of the thermochromic coatings are presented. Such a combination of properties and relatively low deposition temperature has not yet been published by other teams for thermochromic VO2-based coatings prepared by a scalable technique.
Czech name
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Czech description
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Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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