Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F24%3A43972202" target="_blank" >RIV/49777513:23520/24:43972202 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1088/1361-6595/ad56c7" target="_blank" >https://doi.org/10.1088/1361-6595/ad56c7</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/ad56c7" target="_blank" >10.1088/1361-6595/ad56c7</a>
Alternative languages
Result language
angličtina
Original language name
Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
Original language description
The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons accumulated behind the magnetic trap are prevented from reaching the positive target. Consequently, a space charge double layer (DL) is formed between the positive target and the plasma behind the magnetic trap, leading to electron acceleration across the DL and RD ignition. This study reveals the significant impact of the magnetic field configuration on RD ignition. Experiments are performed using a Ti target involving magnetic field variation, wire probe measurements of floating potential, and optical emission spectroscopy imaging. It is found that adjusting the magnetic field to a more balanced configuration leads to earlier RD ignition, while a more unbalanced one delays or even prevents it. Specifically, the time of RD ignition decreases with an increase in the magnetic null point distance from the target. Moreover, the size and shape of optical emission in the RD varies with nearby probe placement, suggesting sensitivity to external electrodes.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/EH22_008%2F0004572" target="_blank" >EH22_008/0004572: Quantum materials for applications in sustainable technologies</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN
0963-0252
e-ISSN
1361-6595
Volume of the periodical
33
Issue of the periodical within the volume
6
Country of publishing house
GB - UNITED KINGDOM
Number of pages
7
Pages from-to
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UT code for WoS article
001250762000001
EID of the result in the Scopus database
2-s2.0-85196818064