Magnetron sputtering of alloy and alloy-based films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F99%3A00042202" target="_blank" >RIV/49777513:23520/99:00042202 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Magnetron sputtering of alloy and alloy-based films

Original language description

The paper reviews a present state of the art in magnetron sputtering of alloy films. It shows that a mixing process, i.e. the addition of a second element into a base, one elements film is, together with ion bombardment, the second dominant process whichcan be used to control film structure. It describes general properties of one element films, binary metal alloy films and films made of nitrides of binary metal alloys. Special attention is paid to the formation of the nanocrystalline and nanocomposite films with a grain size about 10 nm and smaller, and of the high-temperature phases at low temperatures close to room temperature. The alloy and alloy-based films with nanocrystalline structure represent, due to their novel structure and new physical properties, a new generation of materials.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

1999

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

00406090

e-ISSN

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Volume of the periodical

1

Issue of the periodical within the volume

Č.^343-344

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

4

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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