Structure and microhardness of magnetron sputtered ZrCu and ZrCu-N films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F99%3A00037950" target="_blank" >RIV/49777513:23520/99:00037950 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Structure and microhardness of magnetron sputtered ZrCu and ZrCu-N films

Original language description

The properties of ZrCu and ZrCu-N films magnetron sputtered from an alloyed ZrCu (70/30wt.%) target in Ar+N2 at the same total pressure of 0.7 Pa, respectively, are reported. Zr and Cu are immiscible elements in this composition range resulting in characteristic film properties. A ZrCu film sputter deposited on an unheated substrate was nanocrystalline and characterized by one very broad X-ray reflection line; the substrate temperature Ts up to about 500 C did not affect the ZrCu nanocrystalline structure, but at Ts > 500 C recrystallization process started with a polycrystalline ZrCu film being formed. Addition of nitrogen to the ZrCu film converted the nanocrystalline film to a nanocomposite; and to separate clearly individual phases of this nanocomposite its substrate needed heating. ZrCu/N films sputtered at Ts >= 500 C were nanocomposites composed of Cu and ZrN.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

1999

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Vacuum

ISSN

0042207X

e-ISSN

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Volume of the periodical

Vol.^52

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

7

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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