Superhard nanocomposite Ti1-xAlxN films prepared by magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F99%3A00042289" target="_blank" >RIV/49777513:23520/99:00042289 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Superhard nanocomposite Ti1-xAlxN films prepared by magnetron sputtering
Original language description
The paper reports the results of an investigation of Ti1-xAlxN films sputtered from alloyed TiAl (60/40 at.%) terget by a planar round unbalanced magnetron. It was found that (i) the continuous change in pN2 induces a dramatic change in film structure, (ii) the microhardness of Ti1-xAlxN films produced at different values of pN2 correlate well with changes in the film structure and (iii) the superhard (>= 40 GPa) films are two-phase nanocomposities.
Czech name
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Czech description
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Classification
Type
C - Chapter in a specialist book
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
1999
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Book/collection name
Superhard nanocomposite Ti1-xAlxN films prepared by magnetron sputtering
ISBN
8090272401
Number of pages of the result
6
Pages from-to
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Number of pages of the book
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Publisher name
AV ČR
Place of publication
Praha
UT code for WoS chapter
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