Superhard nanocomposite Ti1-xAlxN films prepared by magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F00%3A00053577" target="_blank" >RIV/49777513:23520/00:00053577 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Superhard nanocomposite Ti1-xAlxN films prepared by magnetron sputtering

Original language description

Ti1-xAlxN films were sputtered from an alloyed TiAl (60/40 at.%) target in Ar and Ar + N2 mixture at a constant total pressure of 0.5 Pa by a planar round unbalanced magnetron of 100 mm in diameter. The superhard films are nc-TiAlN/AlN nanocomposite films composed of relatively large TiAlN grains, oriented in one direction and surrounded by an amorphous and/or nc-AlN. These films exhibit a high elastic recovery up to 74 % and contain about 20 at.% Ti, 25 at.% Al and 55 at.% N.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2000

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

00406090

e-ISSN

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Volume of the periodical

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Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

6

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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