Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F12%3A43915258" target="_blank" >RIV/49777513:23520/12:43915258 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0257897212003222" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0257897212003222</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.04.028" target="_blank" >10.1016/j.surfcoat.2012.04.028</a>

Result language
angličtina
Original language name
Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
Original language description
The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlledby the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elasticrecovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
<a href="/en/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Hard nanocomposite coatings with enhanced toughness and unique properties</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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