Durable AlN and Al2O3 Optical Films Deposited by Low Duty Cycle Pulsed Magnetron Sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23420%2F16%3A43931654" target="_blank" >RIV/49777513:23420/16:43931654 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1364/OIC.2016.WA.6" target="_blank" >https://doi.org/10.1364/OIC.2016.WA.6</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OIC.2016.WA.6" target="_blank" >10.1364/OIC.2016.WA.6</a>
Alternative languages
Result language
angličtina
Original language name
Durable AlN and Al2O3 Optical Films Deposited by Low Duty Cycle Pulsed Magnetron Sputtering
Original language description
We applied low-duty cycle pulsed magnetron reactive sputtering of an Al target to achieve stable deposition of transparent Al2O3 films and AlN films with high density, high hardness, and low stress at deposition rates of ~60 nm/min.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Optics InfoBase Conference Papers, Volume Part F31-OIC 2016
ISBN
978-1-943580-13-2
ISSN
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e-ISSN
neuvedeno
Number of pages
3
Pages from-to
"„WA.6.1“"-"„WA.6.3“"
Publisher name
OSA - The Optical Society
Place of publication
Washington, DC
Event location
Tuscon, Arizona, USA
Event date
Jun 19, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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