Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F09%3A00501778" target="_blank" >RIV/49777513:23640/09:00501778 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation
Original language description
This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Electrical Engineering
ISSN
1335-3632
e-ISSN
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Volume of the periodical
60
Issue of the periodical within the volume
5
Country of publishing house
SK - SLOVAKIA
Number of pages
4
Pages from-to
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UT code for WoS article
000271846100008
EID of the result in the Scopus database
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