Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F09%3A00501778" target="_blank" >RIV/49777513:23640/09:00501778 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

Original language description

This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Electrical Engineering

ISSN

1335-3632

e-ISSN

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Volume of the periodical

60

Issue of the periodical within the volume

5

Country of publishing house

SK - SLOVAKIA

Number of pages

4

Pages from-to

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UT code for WoS article

000271846100008

EID of the result in the Scopus database

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