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Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F09%3A00501778" target="_blank" >RIV/49777513:23640/09:00501778 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation

  • Original language description

    This paper deals with the structural and optical properties of the polycrystalline silicon films initially deposited in amorphous state by electron beam evaporation technology on a Corning glass and consequently thermally re-crystallized from solid phase. The re-crystallization process was ?in situ? monitored by X-ray diffraction using an evacuated high temperature chamber at temperatures from 590°C to 650°C. Optical properties of the films carried out from the optical spectrophotometry recorded in a visible range of electromagnetic spectra were then confronted with the micro-structure parameters of the films. Relationships between the crystalline/amorphous state, crystallite size and optical band-gaps, spectral refractive indexes and spectral extinction coefficients are clearly demonstrated.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Electrical Engineering

  • ISSN

    1335-3632

  • e-ISSN

  • Volume of the periodical

    60

  • Issue of the periodical within the volume

    5

  • Country of publishing house

    SK - SLOVAKIA

  • Number of pages

    4

  • Pages from-to

  • UT code for WoS article

    000271846100008

  • EID of the result in the Scopus database