Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F10%3A00503179" target="_blank" >RIV/49777513:23640/10:00503179 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Study of ZnO layer growth by pulsed laser deposition from Zn and ZnO targets

Original language description

The article deals with structural properties of ZnO thin layers prepared on Si (111) by pulsed laser deposition at different pressures (1?35 Pa) of ambient oxygen in the deposition chamber. The growth temperature was 400 °C and a pulsed Nd:YAG laser wasused at a wavelength of 355 nm. Two parallel sets of samples deposited by ablation of different targets (a sintered ceramic pellet of ZnO and a pure metallic Zn target) were examined. The samples were characterized by different analytical methods: scanning electron microscope (SEM), secondary ion mass spectroscopy (SIMS), and X-ray diffraction (XRD). The prepared layers exhibited columnar structure and uniform preferred c-axis orientation. The results showed that the high quality of ZnO films fabricatedfrom both targets is comparable, except for those obtained at low (1 Pa) pressures.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Vacuum

ISSN

0042-207X

e-ISSN

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Volume of the periodical

84

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

4

Pages from-to

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UT code for WoS article

000270625900042

EID of the result in the Scopus database

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