In-process ZnO thin films alloying during pulsed laser deposition

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F13%3A43918218" target="_blank" >RIV/49777513:23640/13:43918218 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1007/s00339-012-7190-1" target="_blank" >http://dx.doi.org/10.1007/s00339-012-7190-1</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s00339-012-7190-1" target="_blank" >10.1007/s00339-012-7190-1</a>

Result language
angličtina
Original language name
In-process ZnO thin films alloying during pulsed laser deposition
Original language description
Alloyed ZnO:Al thin ?lms were prepared by a pulsed laser deposition by the altering of two pure targets (ZnO and Al) during the deposition process. Two deposition temperatures ( ? 197 °C and 400 °C) were applied and differences of diffusion dynamics werecompared. As-grown layered ?lms were annealed and aluminium distribution was homogenized. The results revealed that the amorphous structure (samples grown at ? 197 °C) of ZnO provide more positive conditions for ef?cient Al diffusion in comparison withcrystalline structure (samples grown at 400 °C). A detailed investigation by SIMS depth pro?ling con?rmed a homogeneous chemical composition of annealed and recrystallized ?lms which exhibited a porous nature and wurtzite crystalline structure.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Project
<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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