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Laser micromachining: Comparison of different wavelengths and pulse durations

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F11%3A43897827" target="_blank" >RIV/49777513:23640/11:43897827 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Laser micromachining: Comparison of different wavelengths and pulse durations

  • Original language description

    This work summarizes micromachining experiments accomplish by Nd:YAG lasers with pulse duration 10 ns and 40 ps, using wavelengths 266 nm and 355 nm (third and fourth harmonic). Pulse repetition rate is 10 Hz and energy used during experiments is in therange 0,2 - 10 mJ per pulse. Variety of materials was used, including silicon (thickness 300 mým) and stainless steel (100 mým). The drilling rate for different parameters is determined. The final quality of created holes and repeatability of the processis discussed.

  • Czech name

  • Czech description

Classification

  • Type

    O - Miscellaneous

  • CEP classification

    JK - Corrosion and material surfaces

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2011

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů