Pulsed laser deposition of thin films on actively cooled substrates

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F13%3A43918866" target="_blank" >RIV/49777513:23640/13:43918866 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.vacuum.2013.01.024" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2013.01.024</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2013.01.024" target="_blank" >10.1016/j.vacuum.2013.01.024</a>

Result language

angličtina

Original language name

Pulsed laser deposition of thin films on actively cooled substrates

Original language description

The paper deals with a special arrangement of pulsed laser deposition (PLD) when the substrates were cooled at cryogenic temperatures by liquid nitrogen during the deposition process. Applied materials - zinc oxide and titanium dioxide - play an important role in current optoelectronics and sensor research and a comparative study of their behaviour in presented PLD arrangements were performed. Prepared films (deposited on different substrates: Si (100) and sapphire) were investigated in as-deposited states and their properties in dependence of deposition temperature were compared. Investigation by X-ray diffraction and Raman spectroscopy proved their amorphous structure. Subsequently, annealing under different temperatures (up to 800°C) was applied andproperties of modi?ed structures were compared by using different analytical methods (scanning electron microscopy, X-ray diffraction, Raman spectroscopy, optical absorption spectroscopy and spectroscopic ellipsometry).

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/ED2.1.00%2F03.0088" target="_blank" >ED2.1.00/03.0088: Centre of the New Technologies and Materials</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Vacuum

ISSN

0042-207X

e-ISSN

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Volume of the periodical

98

Issue of the periodical within the volume

December

Country of publishing house

GB - UNITED KINGDOM

Number of pages

6

Pages from-to

56-62

UT code for WoS article

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EID of the result in the Scopus database

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