Nanocolumnar growth of sputtered ZnO thin films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F15%3A43926332" target="_blank" >RIV/49777513:23640/15:43926332 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.tsf.2015.04.009" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2015.04.009</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2015.04.009" target="_blank" >10.1016/j.tsf.2015.04.009</a>

Result language
angličtina
Original language name
Nanocolumnar growth of sputtered ZnO thin films
Original language description
Sequential sputtering technology was developed for the formation of transparent and conductive very thin films of ZnO doped by Al (AZO) with a nanocolumnar polycrystalline structure. The characterization of their properties, including structural (scanning electron microscopy, X-ray diffractometry), electrical (Hall measurements) and optical (visible spectrometry, ellipsometry), was performed. AZO thin films with thicknesses of approximately 100 nm were prepared with a pronounced nanocolumnar and (002) textured crystalline structure, sufficient low resistivity (ALMOST EQUAL TO 10MINUS SIGN 1 ? cm), satisfactory optical transparency (ALMOST EQUAL TO 90%) and adequate refractive index (ALMOST EQUAL TO 2.0) for future applications in biochemical sensors.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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