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Thickness dependent wetting properties and surface free energy of HfO2 thin films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F16%3A43928833" target="_blank" >RIV/49777513:23640/16:43928833 - isvavai.cz</a>

  • Alternative codes found

    RIV/49777513:23520/16:43928833

  • Result on the web

    <a href="http://dx.doi.org/10.1063/1.4953262" target="_blank" >http://dx.doi.org/10.1063/1.4953262</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1063/1.4953262" target="_blank" >10.1063/1.4953262</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Thickness dependent wetting properties and surface free energy of HfO2 thin films

  • Original language description

    We show here that intrinsic hydrophobicity of HfO2 thin films can be easily tuned by the variation of film thickness. We used the reactive high-power impulse magnetron sputtering for preparation of high-quality HfO2 films with smooth topography and well-controlled thickness. Results show a strong dependence of wetting properties on the thickness of the film in the range of 50-250 nm due to the dominance of the electrostatic Lifshitz-van der Waals component of the surface free energy. We have found the water droplet contact angle ranging from ALMOST EQUAL TO120o for the thickness of 50 nm to 100o for the thickness of 2300 nm. At the same time the surface free energy grows from ALMOST EQUAL TO25 mJ/m^2 for the thickness of 50 nm to ALMOST EQUAL TO33 mJ/m^2 for the thickness of 2300 nm. We propose two explanations for the observed thickness dependence of the wetting properties: influence of the non-dominant texture and/or non-monotonic size dependence of the particle surface energy.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    JJ - Other materials

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2016

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    APPLIED PHYSICS LETTERS

  • ISSN

    0003-6951

  • e-ISSN

  • Volume of the periodical

    108

  • Issue of the periodical within the volume

    23

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    5

  • Pages from-to

    '231602-1'-'231602-5'

  • UT code for WoS article

    000378924700010

  • EID of the result in the Scopus database

    2-s2.0-84974529225