Comparative study of ZnO thin film prepared by pulsed laser deposition - Comparison of influence of different ablative lasers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F17%3A43931689" target="_blank" >RIV/49777513:23640/17:43931689 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2016.09.013" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2016.09.013</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2016.09.013" target="_blank" >10.1016/j.vacuum.2016.09.013</a>

Result language
angličtina
Original language name
Comparative study of ZnO thin film prepared by pulsed laser deposition - Comparison of influence of different ablative lasers
Original language description
The contribution deals with transparent conductive oxides based on ZnO, which were prepared by Pulsed Laser Deposition (PLD) and their different properties are compared in the scope of the applied ablating lasers: (1) a solid state Nd:YAG laser working at third harmonic generation (wavelength 355 nm, 15 ns pulse length and 10 Hz pulsing frequency) and (2) an excimer laser working with KrF gas composition (248 nm, 20 ns and 10 Hz). The first part of the study deals with the influence of the oxygen pressure on crystallographic parameters of undoped ZnO films and the pressure interval between 2 and 5 Pa was assessed as an optimum. Moreover, the influence of different doping elements, aluminum and gallium, respectively, were analyzed. The results showed that a small amount (∼0.15% wt. content) of Al (or Ga, respectively) substantially improved carrier concentration with adequate resistivity decrease. Furthermore, optical properties: – transmittances and energy band-gap shift were investigated. Comparison between applied lasers revealed a substantially positive effect on electrical properties for the excimer laser.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
<a href="/en/project/LO1402" target="_blank" >LO1402: CENTEM+</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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