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Process control of plasma polymerization in a large industrial reactor

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12310%2F99%3A00000047" target="_blank" >RIV/60076658:12310/99:00000047 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Process control of plasma polymerization in a large industrial reactor

  • Original language description

    Application of the triple-probe method for volume-resolved monitoring of electron density and electron temperature during industrial-scale polymerization plasma process was tested. As a model process, simultaneous deposition of barrier film on the innerwall of six bottles using an asymmetrical r.f. discharge was investigated.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GA202%2F98%2F0116" target="_blank" >GA202/98/0116: The design of the system for study of the electron energy distribution function during the creation of thin film by means of plasma polymeration</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    1999

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    116-119

  • Issue of the periodical within the volume

    ?

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    5

  • Pages from-to

  • UT code for WoS article

  • EID of the result in the Scopus database