Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F01%3A00003007" target="_blank" >RIV/60076658:12410/01:00003007 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen
Original language description
Dual-mode microwave/radiofrequency (MW/RF) plasmas were systematically investigated by means of Langmuir probe measurements and by mass spectrometry. Maxwellian-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the distribution functions measured in nitrogen revealed two groups of electrons with different energies. Both in argon and nitrogen, the electron density, ne decreased with rising pressure, almost independent of the bias voltage on the RF electrode. The ne value decays exponentially with distance from the MW applicator with a characteristic length comparable to the skin depth. Comparison of ne values from the probe measurements with values calculated from the ion energy distribution functions and ion fluxes exhibit an excellent agreement.
Czech name
—
Czech description
—

Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)