Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00016195" target="_blank" >RIV/00216224:14310/06:00016195 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor
Original language description
The electron density, ion flux and argon emission lines were measured in a radio frequency helicon reactor for different static magnetic field amplitude and low rf powers using cylindrical Langmuir probe, planar probe and optical emission spectroscopy (OES). The static magnetic field amplitude created around the plasma source varied from 0 to 10 mT in the helicon source and from 0 to 1.4 mT in the diffusion chamber. The discharge was created in argon and oxygen at 0.7 Pa with rf powers, between 50 and 600~W, applied to the helicon antenna. The variations of the electron density, ion flux taken from Langmuir probe measurement and from planar probe measurement and Ar 750 nm line intensity with the rf power were in good agreement. Hence, it is concluded that the maximum of electron density observed in the diffusion chamber for the highest values of magnetic field is likely to be due to some confinement of the plasma in the source. Measurements in oxygen discharge showed slightly different
Czech name
Koncentrace elektronů a tok iontů v difúzní komoře nízkotlakého vf helikonového reaktoru
Czech description
Koncentrace elektronů a tok iontů byli měřeny ve vysokofrekvenčním helikonovém reaktoru pří různých magnetických polích, tlaku 0,7 Pa a při vf výkonech 25-600 W pomocí válcové Langmuirovy sondy, planární sondy a optické emisní spetroskopie. Výsledky bylysrovnávány.
Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GD202%2F03%2FH162" target="_blank" >GD202/03/H162: Advanced topics in physics and chemistry of plasmas</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS'06 Proceedings of Contributed Papers, Part II
ISBN
80-86732-85-1
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
150-155
Publisher name
MATFYZPRESS
Place of publication
Praha
Event location
Praha
Event date
Jan 1, 2006
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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