Mapping of the internal plasma parameters of an unbalanced magnetron DC discharge

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F03%3A00004578" target="_blank" >RIV/60076658:12410/03:00004578 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Mapping of the internal plasma parameters of an unbalanced magnetron DC discharge

Original language description

Langmuir probe diagnostics using thin cold cylindrical probe has been performed in r-z plane of a DC unbalanced magnetron discharge in argon at 0.5 and 2.5Pa. Important plasma parameters as the elektron density, plasma and floating potential have been extracted from the measured characteristics and its second derivative. We present typical probe characteristics at selected locations of the discharge as well as komplete spatial distributions of extracted plasma parameters. Comparison with results of recent PIC/MCC simulation is discussed.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

In: ISPC 16I, Full-Papers CD ( f. 523)

ISBN

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ISSN

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e-ISSN

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Number of pages

6

Pages from-to

104

Publisher name

University of Bari

Place of publication

Bari

Event location

Taormina, Italy

Event date

Jun 22, 2003

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

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