Photocatalytic Decomposition of Organic Matter on Titanium Dioxide Film prepared by PECVD

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F07%3A00008117" target="_blank" >RIV/60076658:12410/07:00008117 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Photocatalytic Decomposition of Organic Matter on Titanium Dioxide Film prepared by PECVD

Original language description

This work presents a comparison study of photochemical activity of titanium dioxide deposited by three different methods: by low pressure plasma enhanced chemical vapor deposition (PECVD): capacitive radio frequency (RF) discharge, by atmospheric pressure PECVD barrier torch plasma jet and by low pressure physical vapor deposition (PVD) hollow cathode plasma jet sputtering system. Vapors of titanium (IV) isopropoxide Ti[OCH(CH3)2]4 were used as growth precursors for titanium dioxide films depositon by the both PECVD methods, whereas titanium hollow cathode nozzle was reactively sputtered in the PVD method. Titanium dioxide films were studied by X-ray diffraction (XRD) for crystalline phase analysis and furthermore by measurement of thickness and deposition rate. All the systems produce film with anatase structure. The photochemical activity was tested on decomposition of the Acid orange (AO7). The films also manifest strong microbiological activity, which is demonstrated on inactivatio

Czech name

Fotokatalytický rozklad organických látek na tenké vrstvě TiO2 připravené metodou PECVD

Czech description

Byly zkoumány vrstvy TiO2 deponované nízkotlakým kapacitním RF výbojem, RF tryskou pracující za atmosférického tlaku a nizkotlakým naprašováním. Ve všech vrstvách byla nalezena krystalická struktura odpovídající anatázu. Fotokatalytická účinnost byla testována na základě rozkladu organického barviva Acid ornage. Vrstvy rovněž vykazovaly antibakteriální účinky.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/GA202%2F05%2F2242" target="_blank" >GA202/05/2242: Investigation of new low temperature atmospheric pressure plasma sources for deposition of thin films</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

2007 Society of Vacuum Coaters

ISSN

0737-5921

e-ISSN

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Volume of the periodical

15

Issue of the periodical within the volume

x

Country of publishing house

US - UNITED STATES

Number of pages

4

Pages from-to

117-120

UT code for WoS article

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EID of the result in the Scopus database

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