Thermodynamic of Gas-Phase Parasitic Reactions in AlGaN MOVPE Growth.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F02%3A00006500" target="_blank" >RIV/60461373:22310/02:00006500 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Thermodynamic of Gas-Phase Parasitic Reactions in AlGaN MOVPE Growth.

Original language description

The Lewis acid-base adduct TMAl:NH3 formation and the subsequent methane elimination leading to the trimeric amide [DMAlNH2]3 is the dominant reaction pathway for Al-containing species at low temperatures and atmospheric pressure. Considering the readilycondensation of trimeric amide complexes, these findings can explain the depletion of aluminium in the gaseous phase and the deterioration of the Al incorporation into the growing layers. The pressure reduction has the significant influence on the gas -phase reaction at low temperatures due to enhancement of large molecules dissociation.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

<a href="/en/project/GA104%2F00%2F0572" target="_blank" >GA104/00/0572: Preparation and application of the AIII-nitride epitaxial layers for optical wavequides and sensor structures distillation columns design</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Phys.Status Solidi

ISSN

0031-8957

e-ISSN

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Volume of the periodical

Neuveden

Issue of the periodical within the volume

1

Country of publishing house

DE - GERMANY

Number of pages

4

Pages from-to

133-136

UT code for WoS article

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EID of the result in the Scopus database

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