Transfer of thin, patterned gold layers from poly(methyl methacrylate) stamp onto photoresist surface
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F14%3A43898002" target="_blank" >RIV/60461373:22310/14:43898002 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/14:00236042
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0040609013016672" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609013016672</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2013.10.056" target="_blank" >10.1016/j.tsf.2013.10.056</a>
Alternative languages
Result language
angličtina
Original language name
Transfer of thin, patterned gold layers from poly(methyl methacrylate) stamp onto photoresist surface
Original language description
A simple technique for the transfer of thin gold layer from poly(methyl methacrylate) (PMMA) stamp onto SU-8 photoresist is described and verified. The procedure comprises sputtering of thin gold layer on flat or laser patterned PMMA, bringing the PMMA stamp into contact with photoresist substrate, transferring of the gold layer onto photoresist and finally dissolution of the PMMA stamp. Surface morphology of as sputtered and transferred gold layers was determined by profilometry, confocal microscopy, and atomic force microscopy (AFM) techniques at three different scales. Electrical properties were examined by conductive AFM technique. The transfer from patterned PMMA stamp leads to simultaneous patterning of the gold layer and creation of a system ofordered conductive gold strips separated by non-conductive areas on photoresist surface.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JJ - Other materials
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Thin Solid Films
ISSN
0040-6090
e-ISSN
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Volume of the periodical
550
Issue of the periodical within the volume
JAN 1 2014
Country of publishing house
CH - SWITZERLAND
Number of pages
5
Pages from-to
459-463
UT code for WoS article
000328499700069
EID of the result in the Scopus database
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