Fabrication and application of stainless steel stamps for the preparation of microfluidic devices

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F14%3A43897991" target="_blank" >RIV/60461373:22340/14:43897991 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.mee.2014.04.009" target="_blank" >http://dx.doi.org/10.1016/j.mee.2014.04.009</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.mee.2014.04.009" target="_blank" >10.1016/j.mee.2014.04.009</a>

Result language
angličtina
Original language name
Fabrication and application of stainless steel stamps for the preparation of microfluidic devices
Original language description
The use of an electrochemical polishing process to manufacture stainless steel stamps often gives rise to problems: there is a significant release of gas bubbles that can cause the photoresist mask to peel off. In this paper, a new procedure for the manufacture of stainless steel stamps is presented based on a combination of UV-lithography, gold electroplating, and electropolishing techniques. First, the pattern of the stamp is transferred to a photoresist layer by UV-lithography. The pattern in the photoresist is then filled in with a thin layer of gold formed by electroplating. The photoresist is then removed and the substrate etched in an electropolishing bath, with the gold layer serving as an etching mask. The steel stamps were repeatedly tested for the hot embossing of the polymethylmethacrylate substrate. The imprints were used for the preparation of functional microchips to test their functionality, the chips consisting of two polymethylmethacrylate plates: a plate with microch
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CI - Industrial chemistry and chemical engineering
OECD FORD branch
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Project
<a href="/en/project/TA01010353" target="_blank" >TA01010353: Recycling, separation and purification of rare metals (indium, gallium, ...) from secondary raw material of electronic and photovoltaic industry.</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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