The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F20%3A43921374" target="_blank" >RIV/60461373:22310/20:43921374 - isvavai.cz</a>
Alternative codes found
RIV/61389005:_____/20:00525371 RIV/44555601:13440/20:43895713
Result on the web
<a href="https://onlinelibrary.wiley.com/doi/10.1002/sia.6821" target="_blank" >https://onlinelibrary.wiley.com/doi/10.1002/sia.6821</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/sia.6821" target="_blank" >10.1002/sia.6821</a>
Alternative languages
Result language
angličtina
Original language name
The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography
Original language description
3D microstructures in pure poly(dimethylsiloxane) (PDMS) and PDMS with embedded Au nanoparticles were prepared by ion beam lithography without any further etching. Two mega-electron volts helium and 10 MeV oxygen ions were used for ion microstructuring. Parallel lines of 1 mm in length and 10 mu m in thickness were fabricated for investigation of the effect of the nanoparticles presence in the polymer on the surface morphology of the created microstructures. The created microstructures were checked by optical microscope. Infrared (IR) spectrometry was used to study the effect of the ions type and fluence on the chemical changes of the material. Atomic force microscopy was used for the fine detail study as well as for checking the microstructure quality. Analysis revealed an increased radiation resistance of the nanocomposite compared to the pure PDMS. Shrinkage is proportional to the fluence, but the maximum value for both materials is limited by saturation. 3D microstructure in modified PDMS obtained at the same irradiation condition as pure PDMS is characterized by its smaller height. Obtaining the microstructure in nanocomposite of the same height as in pure PDMS by increasing the fluence can be impossible due to saturation of shrinkage and/or radiation-induced heating of the material.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface Interface Analysis
ISSN
0142-2421
e-ISSN
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Volume of the periodical
52
Issue of the periodical within the volume
12
Country of publishing house
US - UNITED STATES
Number of pages
5
Pages from-to
1040-1044
UT code for WoS article
000537352400001
EID of the result in the Scopus database
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