Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F19%3A00518743" target="_blank" >RIV/61389005:_____/19:00518743 - isvavai.cz</a>
Alternative codes found
RIV/60461373:22310/19:43919253 RIV/44555601:13440/19:43894751
Result on the web
<a href="https://doi.org/10.1016/j.nimb.2019.09.043" target="_blank" >https://doi.org/10.1016/j.nimb.2019.09.043</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.nimb.2019.09.043" target="_blank" >10.1016/j.nimb.2019.09.043</a>
Alternative languages
Result language
angličtina
Original language name
Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA
Original language description
Our research is devoted to the shrinkage and swelling of PMMA film after micro-structuring with ion beam lithography. 10 MeV O4+ ions were used in the experiment. Parallel lines of 1 mm in length and 10 mu m in thickness were created. The number of scan cycles and ion fluence were varied. The influence of the irradiation regime on PMMA elemental composition in micro-structured parts and microstructure morphology were studied. It was shown that microstructures created in PMMA film undergo both shrinkage and swelling processes depending on both the scan speed and the fluence. For the same fluence, shrinkage appears at fast scan speeds and swelling at slow ones. The same phenomenon was found in relation to the fluence for the same scan speed. It was observed that PMMA film rupture caused by irradiation occurred prior to the start of the carbonization of the irradiated area.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments & Methods in Physics Research Section B
ISSN
0168-583X
e-ISSN
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Volume of the periodical
461
Issue of the periodical within the volume
12
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
6
Pages from-to
175-180
UT code for WoS article
000501391200032
EID of the result in the Scopus database
2-s2.0-85072937886