Semiconductor Gas Sensors Prepared by Sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F00%3A00006274" target="_blank" >RIV/60461373:22340/00:00006274 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Semiconductor Gas Sensors Prepared by Sputtering
Original language description
Thin films of several metal oxides were prepared by cathodic sputtering. The sputtering of oxides is a suitable technology for mass production of cheap and sensitive sensors.
Czech name
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Czech description
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Classification
Type
A - Audiovisual production
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2000
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
ISBN
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Place of publication
Kouty nad Desnou
Publisher/client name
MSM
Version
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Carrier ID
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