Fabrication of microsystems with functional layers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F08%3A00020758" target="_blank" >RIV/60461373:22340/08:00020758 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Fabrication of microsystems with functional layers
Original language description
Microstructurized systems are of increasing interest in chemical engineering. In our laboratory we are able to fabricate simple microsystems from polymer and glass substrates. As we are interested in behaviour of reaction-diffusion-migration systems on amicro-scale, techniques how to study such systems experimentally should be developed. In presented contribution we will concentrate on our experiences with metal functional layers inside microstructurized systems, e. g., microelectrode arrays. There isa lot of problems with metal-polymer adhesion, bonding the surfaces once covered by a metal layer, mechanical stability of microelectrodes etc. Sample products will be presented.
Czech name
Výroba mikrosystémů s funkčními vrstvami
Czech description
V příspěvku jsou prezentovány zkušenosti s výrobou mikrostrukturovaných zařízení s funkčními vrstvami, zejména poli kovových mikroelektrod. Diskutovány jsou problémy s adhezí polymer-kov, spojování jednotlivých vrstev, mechanická stabilita mikroelektrodaj.
Classification
Type
D - Article in proceedings
CEP classification
CI - Industrial chemistry and chemical engineering
OECD FORD branch
—
Result continuities
Project
<a href="/en/project/GA203%2F07%2F1320" target="_blank" >GA203/07/1320: Study of spatial profiles of state variables in microstructurized chemical systems</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of 35th International Conference of Slovak Society of Chemical Engineering
ISBN
978-80-227-2903-1
ISSN
—
e-ISSN
—
Number of pages
9
Pages from-to
—
Publisher name
Slovak society of chemical engineering
Place of publication
Bratislava
Event location
Tatranské Matliare
Event date
May 26, 2008
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—