Optical Emission Spectroscopy of Plasma in Hybrid Pulsed Laser Deposition System.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388955%3A_____%2F02%3A54020261" target="_blank" >RIV/61388955:_____/02:54020261 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical Emission Spectroscopy of Plasma in Hybrid Pulsed Laser Deposition System.
Original language description
Optical emission spectroscopy method was used for plasma investigation in hybrid pulsed laser deposition system (HPLD) suitable for rich nitrogenated CNx thin films creation. HPLD system was based on combination of pulsed laser deposition (PLD) and an additional radiofrequency (RF) discharge. RF discharge plasma was generated between two electrodes situated parallel to plasma plume from graphite target, in nitrogen ambient. Plasma species as CN, N-2, N-2(+), N, C-2, C and C+ were detected. Influence ofnitrogen pressure, RF power, geometrical arrangement of electrodes on emission intensity was studied. Vibrational temperature of N-2, CN and rotational temperature of CN was estimated.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
<a href="/en/project/IAA1010110" target="_blank" >IAA1010110: Novel Laser-based Hybrid Technologies for thin Film Deposition</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Czechoslovak Journal of Physics
ISSN
0011-4626
e-ISSN
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Volume of the periodical
52
Issue of the periodical within the volume
Suppl. D
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
7
Pages from-to
292-298
UT code for WoS article
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EID of the result in the Scopus database
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