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Excited States of Pt(PF3)4 and Their Role in Focused Electron Beam Nanofabrication

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388955%3A_____%2F16%3A00459717" target="_blank" >RIV/61388955:_____/16:00459717 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1021/acs.jpcc.6b02660" target="_blank" >http://dx.doi.org/10.1021/acs.jpcc.6b02660</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1021/acs.jpcc.6b02660" target="_blank" >10.1021/acs.jpcc.6b02660</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Excited States of Pt(PF3)4 and Their Role in Focused Electron Beam Nanofabrication

  • Original language description

    Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)4 by using the available cross sections for electronic excitation and characterizing fragmentation of the excited states theoretically by TDDFT. The potential energy curves for a number of states visible in the experimental electron energy loss spectra are dissociative, either directly or via conical intersections, indicating that the quantum yield for dissociation is close to 100%. Taking into account typical electron energy distribution at the FEBID spot reveals that the importance of neutral dissociation exceeds that of dissociative electron attachment, which has been so far considered to be the dominant decomposition process. We thus established neutral dissociation as an important, albeit often neglected, channel for FEBID using Pt(PF3)4. The calculations revealed a number of other phenomena that can play a role in electron induced chemistry of this compound, e.g., a considerable increase of bond dissociation energy with sequential removal of multiple ligands.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    CF - Physical chemistry and theoretical chemistry

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2016

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Physical Chemistry C

  • ISSN

    1932-7447

  • e-ISSN

  • Volume of the periodical

    120

  • Issue of the periodical within the volume

    19

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    8

  • Pages from-to

    10667-10674

  • UT code for WoS article

    000376417500060

  • EID of the result in the Scopus database

    2-s2.0-84971318229