Excited States of Pt(PF3)4 and Their Role in Focused Electron Beam Nanofabrication
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388955%3A_____%2F16%3A00459717" target="_blank" >RIV/61388955:_____/16:00459717 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1021/acs.jpcc.6b02660" target="_blank" >http://dx.doi.org/10.1021/acs.jpcc.6b02660</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1021/acs.jpcc.6b02660" target="_blank" >10.1021/acs.jpcc.6b02660</a>
Alternative languages
Result language
angličtina
Original language name
Excited States of Pt(PF3)4 and Their Role in Focused Electron Beam Nanofabrication
Original language description
Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)4 by using the available cross sections for electronic excitation and characterizing fragmentation of the excited states theoretically by TDDFT. The potential energy curves for a number of states visible in the experimental electron energy loss spectra are dissociative, either directly or via conical intersections, indicating that the quantum yield for dissociation is close to 100%. Taking into account typical electron energy distribution at the FEBID spot reveals that the importance of neutral dissociation exceeds that of dissociative electron attachment, which has been so far considered to be the dominant decomposition process. We thus established neutral dissociation as an important, albeit often neglected, channel for FEBID using Pt(PF3)4. The calculations revealed a number of other phenomena that can play a role in electron induced chemistry of this compound, e.g., a considerable increase of bond dissociation energy with sequential removal of multiple ligands.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physical Chemistry C
ISSN
1932-7447
e-ISSN
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Volume of the periodical
120
Issue of the periodical within the volume
19
Country of publishing house
US - UNITED STATES
Number of pages
8
Pages from-to
10667-10674
UT code for WoS article
000376417500060
EID of the result in the Scopus database
2-s2.0-84971318229