Micro-patterns fabrication using focused proton beam lithography
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F16%3A00459129" target="_blank" >RIV/61389005:_____/16:00459129 - isvavai.cz</a>
Alternative codes found
RIV/44555601:13440/16:43887625
Result on the web
<a href="http://dx.doi.org/10.1016/j.nimb.2015.10.006" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2015.10.006</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.nimb.2015.10.006" target="_blank" >10.1016/j.nimb.2015.10.006</a>
Alternative languages
Result language
angličtina
Original language name
Micro-patterns fabrication using focused proton beam lithography
Original language description
Proton beam writing technique was recently introduced at 3 MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0 MeV and 2.6 MeV protons micro-beam. Micro-channels (52 mu m x 52 mu m) have been realized. nAfter chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM).
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BG - Nuclear, atomic and molecular physics, accelerators
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments & Methods in Physics Research Section B
ISSN
0168-583X
e-ISSN
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Volume of the periodical
371
Issue of the periodical within the volume
MAR
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
6
Pages from-to
344-349
UT code for WoS article
000373412000069
EID of the result in the Scopus database
2-s2.0-84960450086