Ion Micro Beam, promising methods for interdisciplinary research

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F16%3A00460790" target="_blank" >RIV/61389005:_____/16:00460790 - isvavai.cz</a>
Alternative codes found
RIV/60461373:22310/16:43902158
Result on the web
<a href="http://dx.doi.org/10.1088/1748-0221/11/05/C05001" target="_blank" >http://dx.doi.org/10.1088/1748-0221/11/05/C05001</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1748-0221/11/05/C05001" target="_blank" >10.1088/1748-0221/11/05/C05001</a>

Result language
angličtina
Original language name
Ion Micro Beam, promising methods for interdisciplinary research
Original language description
An increasing attractiveness of top-down nanotechnology using nuclear microprobe techniques have been gathered to the micro and nano patterning process for polymers. This paper presents the research activity on innovative promising techniques able to produce three-dimensional (3D) micro-structures in polymeric resists as well as to obtain images of fabricated nanostructures at Tandetron Laboratory (LT) of the Nuclear Physics Institute in Rez (Czech Republic). The Proton Beam Writing (PBW) technique was used to irradiate PMMA resist with energy of MeVs protons. The fabricated patterns were developed in chemical bath using different etching rates. An overview of micro-scale structures have been fabricated selecting the beam, the energy, the fluence and the exposition time. The produced structures were investigated by different analysis techniques among which Scanning Transmission Ion Microscopy (STIM). The characterizations of the fabricated microtunnels are presented and discussed.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BG - Nuclear, atomic and molecular physics, accelerators
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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