Mechanical and optical properties of SiO2 thin films deposited on glass
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389013%3A_____%2F18%3A00497477" target="_blank" >RIV/61389013:_____/18:00497477 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/18:00497477
Result on the web
<a href="http://dx.doi.org/10.1007/s11696-018-0420-z" target="_blank" >http://dx.doi.org/10.1007/s11696-018-0420-z</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s11696-018-0420-z" target="_blank" >10.1007/s11696-018-0420-z</a>
Alternative languages
Result language
angličtina
Original language name
Mechanical and optical properties of SiO2 thin films deposited on glass
Original language description
The optical and mechanical properties of amorphous SiO2 flms deposited on soda-lime silicate foat glass by reactive RF magnetron sputtering at room temperature were investigated in dependence of the process pressure. The densities of the flms are strongly infuenced by the process pressure and vary between 2.38 and 1.91 g cm−3 as the pressure changes from 0.27 to 1.33 Pa. The refractive indices of the flms shift between 1.52 and 1.37, while the residual compressive stresses in the deposited flms vary in the range from 440 to 1 MPa. Hardness and reduced elastic modulus values follow the same trend and decline with the increase of process pressure from 8.5 to 2.2 GPa and from 73.7 to 30.9 GPa, respectively. The abrasive wear resistance decreases with the density of the films.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10402 - Inorganic and nuclear chemistry
Result continuities
Project
<a href="/en/project/EF16_013%2F0001403" target="_blank" >EF16_013/0001403: European support of the Czech participation in construction of CTA observatory (CTA-CZ)</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Chemical Papers
ISSN
0366-6352
e-ISSN
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Volume of the periodical
72
Issue of the periodical within the volume
9
Country of publishing house
SK - SLOVAKIA
Number of pages
9
Pages from-to
2143-2151
UT code for WoS article
000440149500003
EID of the result in the Scopus database
2-s2.0-85050778416