Effect of deposition conditions on physical properties of sputtered silicon oxynitride thin films on float glass

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F18%3A73587298" target="_blank" >RIV/61989592:15310/18:73587298 - isvavai.cz</a>
Result on the web
<a href="https://onlinelibrary.wiley.com/doi/epdf/10.1111/ijag.12346" target="_blank" >https://onlinelibrary.wiley.com/doi/epdf/10.1111/ijag.12346</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1111/ijag.12346" target="_blank" >10.1111/ijag.12346</a>

Result language
angličtina
Original language name
Effect of deposition conditions on physical properties of sputtered silicon oxynitride thin films on float glass
Original language description
Silicon oxynitride layers have been widely used to tailor the optical performance and mechanical resistance of multilayer optical coatings. The key issue for their reliable large-scale application on a glass substrate is the effect of technological parameters on their performance. Here we report on the interrelationship between the conditions of the reactive magnetron deposition process and composition, structure and in turn optical and mechanical properties. The process gas composition and pressure level exhibit a strong influence on the film properties, whereas only moderate effect of magnetron power was observed. The O/(O+N) ratio of the films changes from 0.33 to 0.90 and the film density varies between 2.66 g.cm-3 and 1.85 g.cm-3 along with the increase in the process gas pressure from 0.58 Pa to 1.02 Pa. The refractive index shifts between 1.81 and 1.48 and the residual stress of the film varies in the range from compressive (-385 MPa) to tensile (26 MPa). Hardness and reduced modulus follow the same trend and decline with the increase in process pressure from 12.1 GPa to 2.1 GPa and from 120.3 to 31.6 GPa, respectively. The abrasive wear resistance decreases with the nitrogen content in the films.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20501 - Materials engineering

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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