In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F18%3A43951200" target="_blank" >RIV/49777513:23520/18:43951200 - isvavai.cz</a>

Result on the web

<a href="https://doi.org/10.1016/j.tsf.2018.05.029" target="_blank" >https://doi.org/10.1016/j.tsf.2018.05.029</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2018.05.029" target="_blank" >10.1016/j.tsf.2018.05.029</a>

Result language

angličtina

Original language name

In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering

Original language description

Reactive high-power impulse magnetron sputtering (HiPIMS) was used for deposition of amorphous In−Ga−Zn−O films at low substrate temperature (&lt; 70 °C). The depositions were performed using a strongly unbalanced magnetron equipped with a ceramic In2Ga2ZnO7 target (100mm in diameter). Films were prepared at a constant argon pressure of 1 Pa on standard soda-lime glass at a target-to-substrate distance of 100 mm. The effect of pulse-averaged target power density (in the range 100–1020 W/cm^2 at a constant average target power density of 5 W/cm^2) is discussed for two series of films: with and without admixed O2 into the discharge. Obtained results show that the value of the pulse-averaged target power density is an effective parameter for tuning of electrical and optical properties of the films. The films prepared without admixed O2 exhibit increasing optical transparency and Hall mobility with an increasing value of the pulse-averaged target power density whereas the electrical resistivity is in the range ~ 0.1–10 Ω.cm as a result of an increasing oxygen film concentration. The admixed O2 into the plasma discharge strongly influenced the chemical composition of the films which is in this case invariant to value of the pulse-averaged target power density. However, in this case, there is a rapid increase of the film resistivity (from ~ 1 Ω.cm to 1 MΩ.cm) with an increasing pulse-averaged target power density whereas all films are highly optically transparent (extinction coefficient at the wavelength of 550 nm ≤ 0.009 ). Various mechanisms responsible for the different behaviors of these two series are also discussed.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20506 - Coating and films

Project

<a href="/en/project/LO1506" target="_blank" >LO1506: Sustainability support of the centre NTIS - New Technologies for the Information Society</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Volume of the periodical

658

Issue of the periodical within the volume

31 July 2018

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

27-32

UT code for WoS article

000433425200005

EID of the result in the Scopus database

2-s2.0-85047092612