High-rate reactive high-power impulse magnetron sputtering of transparent conductive Al-doped ZnO thin films prepared at ambient temperature

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F19%3A43954934" target="_blank" >RIV/49777513:23520/19:43954934 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23640/19:43954934
Result on the web
<a href="https://doi.org/10.1016/j.tsf.2019.04.009" target="_blank" >https://doi.org/10.1016/j.tsf.2019.04.009</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2019.04.009" target="_blank" >10.1016/j.tsf.2019.04.009</a>

Result language
angličtina
Original language name
High-rate reactive high-power impulse magnetron sputtering of transparent conductive Al-doped ZnO thin films prepared at ambient temperature
Original language description
Reactive high-power impulse magnetron sputtering was used for high-rate (deposition rate of 60 nm/min) deposition of conductive (resistivity of 0.003 Ω·cm) and optically transparent (extinction coefficient at the wavelength of 550 nm of 0.01) ZnO:Al thin films at ambient temperature (< 40 °C). We used planar Zn:Al target (3.09 at.% of Al) with diameter of 100 mm and thickness of 6 mm mounted on strongly unbalanced magnetron. The films were deposited in argon‑oxygen atmosphere at constant argon and oxygen partial pressure of 2.0 Pa and 0.1 Pa, respectively. An average target power and voltage pulse length were kept constant to 1.9 W/cm^2 and 200 µs, respectively. A pulse-averaged target power density was varied in the range of 190–940 W/cm^2. Optical emission spectroscopy was used for better understanding of correlations between plasma discharge properties and structural, electrical and optical properties of prepared films.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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