RF magnetron sputtering of silver thin film in Ne, Ar and Kr discharges-plasma characterisation and surface morphology

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00396058" target="_blank" >RIV/68378271:_____/13:00396058 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.05.024" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2012.05.024</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.05.024" target="_blank" >10.1016/j.surfcoat.2012.05.024</a>

Result language

angličtina

Original language name

RF magnetron sputtering of silver thin film in Ne, Ar and Kr discharges-plasma characterisation and surface morphology

Original language description

We have carried out a systematic study of the influence of Ne, Ar and Kr working gases on both plasma and film properties of RF magnetron sputtering of silver. The magnetron plasma was characterised by optical emission spectroscopy (OES) and mass spectrometry. Silver thin film morphology was examined by SEM and AFM. We studied influence of magnetron power and working gas pressure on the plasma composition. The magnetron power was varied from 25 to 100 W. The ambient pressure was changed from 0.5 Pa to 3Pa. Both mass and OES spectra revealed presence of highly excited plasma in the substrate vicinity for all sputtering gases. The increasing OES signal intensities of Ag and Ag+ with increasing RF power and gas pressure were observed. However, in Ar discharge there was no Ag+ signal detected by OES at lower pressures of 0.5 Pa and 1 Pa. Similar profiles of the energy distributions of the ions with a maximum located around.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

228

Issue of the periodical within the volume

Suppl. 1

Country of publishing house

CH - SWITZERLAND

Number of pages

4

Pages from-to

"S466?S469"

UT code for WoS article

000323628400102

EID of the result in the Scopus database

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