Application of EUV optics to surface modification of materials

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F13%3A00395869" target="_blank" >RIV/61389021:_____/13:00395869 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Application of EUV optics to surface modification of materials

Original language description

We report results of experiments connected with surface modi?cation of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/LG13029" target="_blank" >LG13029: Research in the Frame of the Internatinal Center for Dense Magnetized Plasmas</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SPIE 8777

ISBN

978-0-8194-9579-2

ISSN

0277-786X

e-ISSN

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Number of pages

7

Pages from-to

877707-877707

Publisher name

SPIE Press

Place of publication

Bellingham, Washington

Event location

Prague

Event date

Apr 15, 2013

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000329577700005