Aging of Al thin film extreme ultraviolet filters
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F19%3A00518278" target="_blank" >RIV/61389021:_____/19:00518278 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2521988" target="_blank" >http://dx.doi.org/10.1117/12.2521988</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2521988" target="_blank" >10.1117/12.2521988</a>
Alternative languages
Result language
angličtina
Original language name
Aging of Al thin film extreme ultraviolet filters
Original language description
Thin film Al filters, very popular for their high transmittance in the wavelength range 17 to 67 nm and simultaneously low transmittance in the visible and near UV region, are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material, and, therefore, they strongly influence the total transmittance of the filter. This paper gives not only the transmittance of very old Al filters, but also maps the transmittance development of Al filters in two years span since their delivery in not controlled atmosphere. Surprisingly, it turned out that while the transmission of surface layers (present on filters since the very beginning) slightly increases with time, the average attenuation rate per unit filter thickness of the bulk material (Al) with time dramatically rises.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
—
OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/LTT17015" target="_blank" >LTT17015: Reserch in frame International Center for Dense Magnetized Plasmas</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE - The International Society for Optical Engineering
ISBN
9781510627307
ISSN
0277-786X
e-ISSN
—
Number of pages
6
Pages from-to
"Roč. 11035 (2019)"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Praha
Event date
Apr 1, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000489750600009