Guided-mode resonance based humidity sensing using a multilayer dielectric structure
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27240%2F20%3A10245817" target="_blank" >RIV/61989100:27240/20:10245817 - isvavai.cz</a>
Result on the web
<a href="https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-28-20-28954&id=439687" target="_blank" >https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-28-20-28954&id=439687</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.399816" target="_blank" >10.1364/OE.399816</a>
Alternative languages
Result language
angličtina
Original language name
Guided-mode resonance based humidity sensing using a multilayer dielectric structure
Original language description
We report on a highly sensitive measurement of the relative humidity of air, which utilizes a guided-mode resonance (GMR) of a multilayer dielectric structure (MDS) and the spectral interference of s- and p-polarized waves reflected from the MDS. We employ the MDS represented by four bilayers of TiO2/SiO2 with a termination layer of TiO2 and demonstrate that the GMR shows up as a shallow and asymmetric dip. The GMR enables us to measure the relative humidity (RH) of air with sensitivities of 0.031-0.114 nm/%R.H. In addition, by employing a birefringent crystal of mica, which modifies the phase difference between the polarized waves, the GMR is transformed into the resonance with a sharp dip, and the measured sensitivity is enhanced to 0.120 nm/%RH at 81 %RH. We also determined the sensitivity to the refractive index and the figure of merit as high as 8000 nm/refractive index unit (RIU) and 702 RIU-1, respectively. The results demonstrate that the GMR based sensor employing the MDS and the spectral interference of polarized waves with their phase difference appropriately adjusted enables a highly sensitive, hysteresis-free humidity measurement, characterized by a high FOM. Humidity sensors employing dielectric multilayers thus represent an effective alternative to available sensors, with advantages such as better mechanical and chemical stability.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optics Express
ISSN
1094-4087
e-ISSN
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Volume of the periodical
28
Issue of the periodical within the volume
20
Country of publishing house
US - UNITED STATES
Number of pages
7
Pages from-to
28954-28960
UT code for WoS article
000581074800019
EID of the result in the Scopus database
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