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Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27240%2F20%3A10246157" target="_blank" >RIV/61989100:27240/20:10246157 - isvavai.cz</a>

  • Result on the web

    <a href="https://www.mdpi.com/1424-8220/20/23/6788" target="_blank" >https://www.mdpi.com/1424-8220/20/23/6788</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.3390/s20236788" target="_blank" >10.3390/s20236788</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure

  • Original language description

    In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the theoretical analysis of the designed PWS showed a sensitivity to the refractive index up to 6600 nm per refractive index unit (RIU) and a figure of merit (FOM) up to 224 RIU-1. In response to these promising theoretical results, the PWS was used to measure the relative humidity (RH) of moist air with a sensitivity up to 0.141 nm/%RH and a FOM reaching 3.7 x 10(-3)%RH-1. The results demonstrate that this highly-sensitive and hysteresis-free sensor based on GMR has the potential to be used in a wide range of applications.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/EF17_048%2F0007399" target="_blank" >EF17_048/0007399: New Composite Materials for Environmental Applications</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Sensors

  • ISSN

    1424-3210

  • e-ISSN

  • Volume of the periodical

    20

  • Issue of the periodical within the volume

    23

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    13

  • Pages from-to

    "6788(1)"-"6788(13)"

  • UT code for WoS article

    000597457600001

  • EID of the result in the Scopus database