Reconstruction of grating parameters from ellipsometric data

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F04%3A00011034" target="_blank" >RIV/61989100:27350/04:00011034 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Reconstruction of grating parameters from ellipsometric data

Original language description

This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of quared shape, with sharp edges and depth to period ratio about 1/1000. The rigorouscoupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit is to find unknown thickness of all parts of dots.

Czech name

Rekonstrukce parametrů mřížky z elipsometrických dat

Czech description

Rekonstrukce parametrů mřížky z elipsometrických dat

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Proceedings of SPIE

ISSN

0277-786X

e-ISSN

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Volume of the periodical

Neuveden

Issue of the periodical within the volume

5445

Country of publishing house

US - UNITED STATES

Number of pages

4

Pages from-to

226-229

UT code for WoS article

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EID of the result in the Scopus database

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