Analysis and modeling of depolarization effects in Mueller matrix spectroscopic ellipsometry data

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27640%2F16%3A86098473" target="_blank" >RIV/61989100:27640/16:86098473 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.mspro.2016.03.020" target="_blank" >http://dx.doi.org/10.1016/j.mspro.2016.03.020</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.mspro.2016.03.020" target="_blank" >10.1016/j.mspro.2016.03.020</a>

Result language

angličtina

Original language name

Analysis and modeling of depolarization effects in Mueller matrix spectroscopic ellipsometry data

Original language description

In this paper we present importance of depolarization effects modeling to fit spectroscopic Mueller matrix ellipsometry data. The relevant theoretical background based on Mueller matrix formalism is presented. The sample of SiO2 layer (approx. 1 mu m thick) on silicon substrate is used to demonstrate depolarization effects in obtained experimental data. In the first step the presence of interferences in the layer is used for modeling of depolarization effects caused by finite spectral resolution of the Mueller matrix ellipsometer. In the next step the depolarization caused by focusing of the probe light is analyzed and modeled. Both finite spectral resolution and beam focusing is a common issue in the optical characterization of samples with lateral dimensions smaller than (commonly used) collimated beam. Therefore to fit experimental data with model it is important to assume those depolarization effect into model. (C) 2016 The Authors. Published by Elsevier Ltd.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2016

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Procedia Materials Science. Volume 12

ISBN

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ISSN

2211-8128

e-ISSN

—

Number of pages

6

Pages from-to

112-117

Publisher name

Elsevier

Place of publication

Amsterdam

Event location

Ostrava

Event date

Sep 8, 2014

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000386622900020