Numerical investigation on the effect of gas-phase dynamics on graphene growth in chemical vapor deposition
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27710%2F24%3A10254907" target="_blank" >RIV/61989100:27710/24:10254907 - isvavai.cz</a>
Result on the web
<a href="https://www.scopus.com/record/display.uri?eid=2-s2.0-85189108326&origin=resultslist&sort=plf-f&src=s&sid=7175291752deae787a74a342d018e9cb&sot=b&sdt=b&s=TITLE%28Numerical+investigation+on+the+effect+of+gas-phase+dynamics+on+graphene+growth+in+chemical+vapor+deposition%29&sl=114&sessionSearchId=7175291752deae787a74a342d018e9cb&relpos=0" target="_blank" >https://www.scopus.com/record/display.uri?eid=2-s2.0-85189108326&origin=resultslist&sort=plf-f&src=s&sid=7175291752deae787a74a342d018e9cb&sot=b&sdt=b&s=TITLE%28Numerical+investigation+on+the+effect+of+gas-phase+dynamics+on+graphene+growth+in+chemical+vapor+deposition%29&sl=114&sessionSearchId=7175291752deae787a74a342d018e9cb&relpos=0</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/5.0199471" target="_blank" >10.1063/5.0199471</a>
Alternative languages
Result language
angličtina
Original language name
Numerical investigation on the effect of gas-phase dynamics on graphene growth in chemical vapor deposition
Original language description
Chemical vapor deposition (CVD) is a crucial technique to prepare high-quality graphene because of its controllability. In the research, we perform a systematic computational fluid dynamics numerical investigation on the effect of gas-phase reaction dynamics on the graphene growth in a horizontal tube CVD reactor. The research results indicate that the gas-phase chemical reactions in the CVD reactor are in a nonequilibrium state, as evidenced by the comparison of species mole fraction distributions during the CVD process and under chemical equilibrium conditions. The effect of gas-phase reaction dynamics on the deposition rate of graphene under different conditions is studied, and our research shows that the main causes of change in graphene growth rates under different conditions are gas-phase reaction dynamics and active species transport. The results of numerical simulation agree well with the experimental phenomena. The research results also indicate that, for methane, the main limiting factor of graphene growth is the surface kinetic reaction rate. Conversely, for active species, the main limiting factor of graphene growth is species transport. Our research suggests that the growth rate of graphene can be regulated from the perspective of the gas reaction mechanism. This method has theoretical guiding significance and can be extended to the preparation of large-area graphene. (C) 2024 Author(s).
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
21000 - Nano-technology
Result continuities
Project
<a href="/en/project/EF16_019%2F0000853" target="_blank" >EF16_019/0000853: Institute of Environmental Technology - Excellent Research</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of applied physics
ISSN
0021-8979
e-ISSN
1089-7550
Volume of the periodical
135
Issue of the periodical within the volume
12
Country of publishing house
US - UNITED STATES
Number of pages
10
Pages from-to
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UT code for WoS article
001198399100012
EID of the result in the Scopus database
2-s2.0-85189108326