Measurement of the shape of objects by two wavelength interferometry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F13%3A33146184" target="_blank" >RIV/61989592:15310/13:33146184 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2019001" target="_blank" >http://dx.doi.org/10.1117/12.2019001</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2019001" target="_blank" >10.1117/12.2019001</a>

Result language
angličtina
Original language name
Measurement of the shape of objects by two wavelength interferometry
Original language description
We propose a fast and precise optical 3D measurement method. The principle is similar to that of white-light interferometry. The broad-band light source of white-light interferometry is replaced by two lasers with different wavelengths. The object to bemeasured is placed into one arm of a Michelson interferometer and moved along the optical axis. The intensity measured at the output of the interferometer is equal to the field autocorrelation. In the case of two wavelengths, the autocorrelation is a periodical function with peaks as a result of their beating. The period can be adjusted by the choice of the wavelength difference. By choosing a short period, a fast and precise measurement is performed in the range of a single beat. However, such a measurement is ambiguous if the object has structures deeper than the beat period. The ambiguity is removed by a fast auxiliary measurement with a long beat period covering the whole depth range of the object. The auxiliary measurement need not
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN)
ISBN
978-0-8194-9567-9
ISSN
0277-786X
e-ISSN
—
Number of pages
6
Pages from-to
"87690H-1"-"87690H-6"
Publisher name
SPIE
Place of publication
Bellingham (OR)
Event location
Singapore
Event date
Apr 9, 2013
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000323566900017

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