Tribological properties of magnetron sputtered amorphous silicon carbide and silicon carbonitride coatings

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F16%3A33161923" target="_blank" >RIV/61989592:15310/16:33161923 - isvavai.cz</a>
Result on the web
<a href="https://www.scientific.net/DDF.368.91" target="_blank" >https://www.scientific.net/DDF.368.91</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.4028/www.scientific.net/DDF.368.91" target="_blank" >10.4028/www.scientific.net/DDF.368.91</a>

Result language
angličtina
Original language name
Tribological properties of magnetron sputtered amorphous silicon carbide and silicon carbonitride coatings
Original language description
The tribological properties of magnetron sputtered amorphous silicon carbide (a-SiC) and silicon carbonitride coatings (a-SiCN) with thickness of 2.2 and 3.4 μm were investigated. Samples were additionally annealed at temperature of 700°C or 900°C in air. Progressive load scratch tests were performed on the annealed samples as well as on the as deposited ones. An acoustic emission signal was detected during all tests using the sample holder with embedded sensor of our own design. Results indicate no change in wear resistance of SiCN sample after high temperature exposure up to 900°C, unlike in the tests of SiC coatings. Detection of acoustic emission generated during the scratch test proved to be a significant improvement for the coating evaluation.
Czech name
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Czech description
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Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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